Partner: VTT Microsystems and Nanoelectronics

VTT Microsystems and Nanoelectronics

Microsystems and Nanoelectronics is part of the VTT Technical Research Centre of Finland (Valtion teknillinen tutkimuskeskus), a national research institute with about 2700 employees. The group is active in IC fabrication, MEMS, radiation detectors, thin films, RF-technologies, superconductors, nanoelectronics, nanophotonics and nanobioelectronics. The facilities include a 1900 square meter clean room of which 550 square meters is of class 10, equipped with 150 mm wafer processing line for BiCMOS and MEMS devices, thin film devices, nanoelectronics and micro and nanophotonics, wafer bonding, thinning and polishing processes, e-beam lithography up to 200 mm wafers, ALD and nanoimprinting lithography. Transport measurements can be performed down to 0.3 K and up to 11 T. RF measurements (up to 110 GHz). Other characterisation tools include AFM, conducting AFM and HRSEM. The setup for optical characterisation include kits for telecom wavelengths and white continuums for visible and IR and stepping con-focal Raman system. Part of the clean room facility is used for small scale production of CMOS, MEMS and SQUID devices. The permanent staff of VTT Microsystems and Nanoelectronics is 58.
Technical areas of expertise
Silicon device fabrication, MEMS, thin films and superconductors, RF devices, nanofabrication, detector design and fabrication, electrical and optical characterisation, nanophotonics, protein membranes on silicon, graphene devices.